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bridging the gap between Scanning Electron Microscopy and Light
Microscopy by extending Optical Resolution to sub - 0.15 µm Decreasing
features sizes of devices on semiconductor wafers and in other
microelectronic components have created the need to extend the optical
limits of inspection far below 1.00 µm. The Radiant Deep UV Microscope
uses 350 nm optics, giving an unrivalled standard for light microscope
imaging. The optical path provides unparelled image contrast with
resolutions down to 0.15 µm.
Aberration free images are captured to a high resolution UV, CCD camera
where they can be digitally processed, displayed, and of course stored
to disc. The Radiant Deep UV Microscope is also equipped with a suite of
standard imaging modilities including bright field, dark field and
Differential Interference Contrast [DIC].
This
comprehensive suite of imaging modalities can be further enhanced by
optical addition of
Confocal Imaging Module
Near Infra Red [NIR] Imaging Module
- simplicity of
operation is key
The Quick Focus Mode provides operator a range of selected imaging frame
rates, as well as the selection of image gain and exposure settings for
optimal real time imaging. All Quick Focus settings can be stored and
recalled by simple, one button selection.
- image capture
mode -
User selectable functions include
image capture and enhancement
selection of gain and frame integration rate
image enhancement for optimum imaging
These settings can be stored and recalled by through the Quick Focus
Mode.
Line and Angle Measurements
pseudo Color [RGB]
- manual
control functions -
Frame Integration of up to 17.5 seconds
Frame Averaging
Gain from 0 to 18 db
Image Sharpening filter
Image Contrast enhancements
Image Brightness enhancements
Auto gain and Exposure settings
- the sample
stage, and other options -
For maximum versatility the Radiant Microscope can be equipped with a
variety of mechanical or motorized stages to accommodate from 6 inch
[150 mm] up to 12 inch [300 mm] wafers.
A Laser Marking system for ablation of silicon and metal is also
available. Please,
contact us for more information ! |
UV image at 1,000x optical magnification showing 0.018 µm line width
separation. Minimum contrast focus.
350 nm UV Image at 1,500x
optical magnification.
350 nm UV Image at 2,000x
optical magnification.
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Radiant
Optronics
